Focused ion beam systems: basics and applications
edited by Nan Yao
New ArrivalFocused ion beam systems: basics and applications
Bibliographic Details
Title
Focused ion beam systems: basics and applications
Author(s)
edited by Nan Yao
Year
2007
Place
Cambridge
Publisher
Cambridge University Press
ISBN
9780521158596
Physical Desc.
xi, 395 p.
Classification & Location
Call Number
621.384.663 -FOC
Subject Code
Materials Science and Engineering
Location
CL
Barcode
181963
Subject & Notes
Subject(s)
Ion beam technology; Sputtering; Microelectronics; Crystallography; Nanofabrication
Index
Includes index (p. 391-395)
Links & Resources
OPAC URL
Publisher
